Basic Information
Introduction to Micro-electro-mechanical Systems (mems). Elastostatics Theory# Field Equations. Dielectrics. Elastostatic Energy. Mems Statics# Electromechanical Beams And Plates. Residual Stresses. Piezoelectrics. Thermoelectric Elasticity Theory# Boundary-value Problems. Exact and Numerical Solutions. Thermal Effects in Microsystems# Thermal Mismatch In Layered Structures. Solutions of Coupled Electro-thermomechanical Problems. Dynamics and Vibration of Electromechanical Systems. Electric Driving Forces. Damping Mechanisms and Measures In Microsystems. Nonlinearity, Stability and Linearization.
Faculty: Mechanical Engineering
|Undergraduate Studies
Pre-required courses
(34029 - Solid Mechanics 2 and 114075 - Physics 2mm) or 114052 - Physics 2
Related Books
- An introduction to microelectromechanical systems engineering - Maluf, Nadim
- An introduction to microelectromechanical systems engineering - Maluf, Nadim.
- Fundamentals of microfabrication : the science of miniaturization - Madou, Marc J.
- Fundamentals of microfabrication and nanotechnology - Madou, Marc J.
- Introduction to microelectromechanical systems engineering - Maluf, Nadim
Semestrial Information
Weekly Hours
3.5 Academic Credit • 3 Lecture Hours • 1 Discussion Hours
Responsible(s)
David Elata
Registration Groups
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Weekly Hours
3.5 Academic Credit • 3 Lecture Hours • 1 Discussion Hours
Responsible(s)
David Elata
Exams
Session A: 31-01-2023 Session B: 05-03-2023Quizzes
Session A: 11-12-2022Registration Groups
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Weekly Hours
3.5 Academic Credit • 3 Lecture Hours • 1 Discussion Hours
Responsible(s)
David Elata
Exams
Session A: 09-02-2022 13:00 - 16:00- דייויס 440.
- דייויס 440.
- דייויס 450.
Quizzes
Session A: 12-12-2021 16:30 - 18:30- דייויס 440,
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