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Definition, Description and Actual Status of Mems Today. Miniaturization and Its Influence On The Mechanical Behavior Of Devices. Micromachining Methods and Their Implementation For Fabrication. Introduction to Micro Mechanics Design. Integration of Sensing and Actuation, Combining Optics, Electronics And Reacting Materials. Using Cad Packages For Micro Electromechanical Systems (mems) Design. Simulation and Analysis Of Microsystems and Packaging Principles.

Faculty: Mechanical Engineering
|Graduate Studies

Pre-required courses

(34010 - Dynamics and 34015 - Mechanical Engineering Design 1 and 34029 - Solid Mechanics 2)

Parallel course

34011 - Theory of Vibration 35033 - Introduction to Integrated Sensing Syst.

Course with no extra credit

35021

• Fundamentals of microfabrication - Madou, Marc J.
• Fundamentals of microfabrication : the science of miniaturization - Madou, Marc J.
• Fundamentals of microfabrication and nanotechnology - Madou, Marc J.
• Methodology for the modeling and simulation of microsystems - Romanowicz, Bartlomiej F.
• Micro mechanical systems : principles and technology
• Micro mechanical systems principles and technology - Fukuda, T.
• Micro mechanical transducers : pressure sensors, accelerometers, and gyroscopes - Bao, Min-Hang
• Micro mechanical transducers pressure sensors, accelerometers, and gyroscopes - Bao, Min-Hang.
• Microactuators : electrical, magnetic, thermal, optical, Mechanical & smart structures - Tabib-Azar, Massood
• Micromachines and nanotechnology : the amazing new world of the ultrasmall - Darling, David J.
• Microsensors : principles and applications - Gardner, Julian W.
• Semiconductor devices : physics and technology - Sze, Simon M.
• Semiconductor sensors