Basic Information
Micro Sensors and Measurement Systems - an Overview of Sensors And Actuators, Electronic Components As Sensors, Physics of Micro Scaling, (and Its Effect On Mechanical, Electrostatac, Magnetic and Surface Tension Forces) Principles of Micro Machining (bulk, Surface) - Cmos Compatible Micro Machnining, Specific Examples# Pressure Sensors, Accelerometers, Infrared Thermal Detectors (system and Fabrication Issues).
Faculty: Electrical and Computer Engineering
|Undergraduate Studies
|Graduate Studies
Course with no extra credit
48968
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