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Micro Sensors and Measurement Systems - an Overview of Sensors And Actuators, Electronic Components As Sensors, Physics of Micro Scaling, (and Its Effect On Mechanical, Electrostatac, Magnetic and Surface Tension Forces) Principles of Micro Machining (bulk, Surface) - Cmos Compatible Micro Machnining, Specific Examples# Pressure Sensors, Accelerometers, Infrared Thermal Detectors (system and Fabrication Issues).

Faculty: Electrical and Computer Engineering
|Undergraduate Studies |Graduate Studies

Course with no extra credit

48968

• An introduction to microelectromechanical systems engineering - Maluf, Nadim
• An introduction to microelectromechanical systems engineering - Maluf, Nadim.
• Fundamentals of microfabrication : the science of miniaturization - Madou, Marc J.
• Fundamentals of microfabrication and nanotechnology - Madou, Marc J.
• Introduction to microelectromechanical (MEM) microwave systems - Santos, Héctor J. de los
• Introduction to microelectromechanical microwave systems - Santos, Héctor J. de los.
• Microsystem design - Senturia, Stephen D.
• Microsystem design - Senturia, Stephen D.
• Microsystem design - Senturia, Stephen D.
• Novel advances in microsystems technologies and their applications
• Novel advances in microsystems technologies and their applications - Francis, Laurent A.
• Practical MEMS - Kaajakari, Ville
• RF MEMS : theory, design, and technology - Rebeiz, Gabriel M.
• RF MEMS circuit design for wireless communications - Santos, Héctor J. de los
• RF MEMS circuit design for wireless communications - Santos, Héctor J. de los.
• RF MEMS theory, design, and technology - Rebeiz, Gabriel M.