Basic Information
Photolithography, Wet and Dry Thermal Oxidation of Silicon, Wet and Dry, Etching, Diffusion, Cvd. Ion Implantation, Evaporation and Sputtering of Thin Films. Characterization Methods For The Processes. Microfabrication of Various Devices.
Faculty: Electrical and Computer Engineering
|Undergraduate Studies
Pre-required courses
44125 - Basics of Semiconductor Devices M or 44127 - Basics of Semiconductor Devices
Course with no extra credit
46238
Related Books
- Fabrication engineering at the micro- and nanoscale - Campbell, Stephen A.
- Introduction to microelectronic fabrication - Jaeger, Richard C.
- Introduction to microelectronic fabrication - Jaeger, Richard C.
- Microelectronic processing : an introduction to the manufacture of integrated circuits - Ruska, W. Scot
- Physics and technology of semiconductor devices - Grove, Andrew S.
- Silicon processing for the VLSI era - Wolf, Stanley
- Silicon VLSI technology : fundamentals, practice and modeling - Plummer, James D.
- Silicon VLSI technology : fundamentals, practice and modeling - Plummer, James D.
- The science and engineering of microelectronic fabrication - Campbell, Stephen A.
- VLSI technology