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Photolithography, Wet and Dry Thermal Oxidation of Silicon, Wet and Dry, Etching, Diffusion, Cvd. Ion Implantation, Evaporation and Sputtering of Thin Films. Characterization Methods For The Processes. Microfabrication of Various Devices.

Faculty: Electrical and Computer Engineering
|Undergraduate Studies

Pre-required courses

44125 - Basics of Semiconductor Devices M or 44127 - Basics of Semiconductor Devices

Course with no extra credit

46238

• Fabrication engineering at the micro- and nanoscale - Campbell, Stephen A.
• Introduction to microelectronic fabrication - Jaeger, Richard C.
• Introduction to microelectronic fabrication - Jaeger, Richard C.
• Microelectronic processing : an introduction to the manufacture of integrated circuits - Ruska, W. Scot
• Physics and technology of semiconductor devices - Grove, Andrew S.
• Silicon processing for the VLSI era - Wolf, Stanley
• Silicon VLSI technology : fundamentals, practice and modeling - Plummer, James D.
• Silicon VLSI technology : fundamentals, practice and modeling - Plummer, James D.
• The science and engineering of microelectronic fabrication - Campbell, Stephen A.
• VLSI technology