Basic Information
Crystal Growth, Epitaxial Growth, Thin Films Depositions Of Semiconductors. Diffusion and Ion Implantation, Oxidation, Dry Etching, Processes, Efficiency and Reliability Of Fabrication of Processes.
Faculty: Materials Science and Engineering
|Undergraduate Studies
Pre-required courses
315030 - Properties of Electronic Materials
Course with no extra credit
315015 - Processes in Microelectronics
Related Books
- Fabrication engineering at the micro- and nanoscale / Stephen A Campbell. - Campbell, Stephen A.
- Semiconductor devices : physics and technology / S.M. Sze, M.K. Lee. - Sze, Simon M.
- Semiconductor integrated circuit processing technology / W.R. Runyan, K.E. Bean. - Runyan, W. R.
- Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber. - Wolf, Stanley
- Silicon VLSI technology : fundamentals, practice and modeling / James D. Plummer, Michael Deal, Peter B. Griffin. - Plummer, James D.
- ULSI technology / edited by C.Y. Chang, S.M. Sze.
- VLSI technology / edited by S. M. Sze.